Morphology analysis of nickel thin films grown by MOCVD

Advanced multilayer metallization schemes with copper as interconnection metal

S. P. Murarka, R.J. Gutmann, Alain E. Kaloyeros et al. · Thin Solid Films · 1993 · 246 citations

Natural Sciences, Materials Engineering, Materials Science +12

Thin Palladium Membrane Formed in Support Pores by Metal-Organic Chemical Vapor Deposition Method and Application to Hydrogen Separation

Shengchun Yan, Hideaki Maeda, Katsuki Kusakabe et al. · Industrial & Engineering Chemistry Research · 1994 · 236 citations

Engineering, Chemical Engineering, Materials Science +17

Organometallic chemical vapor deposition of platinum. Reaction kinetics and vapor pressures of precursors

Zi‐Ling Xue, H. Thridandam, Herbert D. Kaesz et al. · Chemistry of Materials · 1992 · 99 citations

Natural Sciences, Chemistry, Materials Science +8

Epitaxial growth of iridium and platinum films on sapphire by metalorganic chemical vapor deposition

R. Vargas, Takashi Goto, Wei Zhang et al. · Applied Physics Letters · 1994 · 89 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Metal CVD for microelectronic applications: An examination of surface chemistry and kinetics

J. R. Creighton, J. E. Parmeter · Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1993 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +11