Publication | Closed Access
Electrochemical method for slicing Si blocks into wafers using platinum wire electrodes
16
Citations
16
References
2010
Year
Materials EngineeringMaterials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringNanoelectronicsSurface ElectrochemistrySurface SciencePlatinum Wire ElectrodesSi BlocksSemiconductor Device FabricationMicroelectronicsElectrochemical InterfaceElectrochemistryElectrochemical Method
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