Stoichiometric, nonstoichiometric, and locally nonstoichiometric SrTiO3 films grown by molecular beam epitaxy

Abstract

SrTiO 3 films were grown by reactive molecular beam epitaxy to have varying degrees of both global and local cationic nonstoichiometries (with stoichiometry defined as a 1:1 ratio of Sr:Ti). Slight global excesses of Sr and Ti resulted in two-fold reconstructions in the reflection high-energy electron diffraction patterns along the [110] and [100] azimuths, respectively. Larger global nonstoichiometries (2:1 and 1:2 ratios) were also accommodated into the film’s crystalline structure and affected the long-range crystalline order as observed in the x-ray diffraction patterns, both of which were related to the parent perovskite pattern. Local nonstoichiometries were introduced by depositing multiple monolayers (MLs) (from 2 to 33) of SrO and TiO2 in an alternating fashion, while maintaining the global SrTiO3 stoichiometry. These layered structures of SrO and TiO2 blocks inter-reacted during growth to form highly crystalline epitaxial SrTiO3. Films grown in this manner with blocks thicker than 8 MLs were fully relaxed and, when the block thicknesses ranged between 8 and 10 MLs, the full widths at half maxima of 2θ peaks were narrower than the standard SrTiO3 films having blocks 1 ML thick.