Influence of platinum-based electrodes on the microstructure of sol-gel and MOD prepared lead zirconate titanate films

Abstract

Abstract The microstructure and preferred orientation of PZT films deposited by spin-coating techniques are shown to depend on the morphology of the Ti/Pt bottom electrode. Annealing of the as-deposited Ti/Pt electrodes results in the formation of hillocks. These hillocks serve as nucleation sites for perovskite formation and thus determine the microstructure and preferred orientation of the crystallized PZT films. The microstructure features are investigated by X-ray diffraction analyses and scanning and transmission electron microscopies.