Plasma deposition of inorganic silicon containing films

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

Natural Sciences, Chemistry, Materials Science +17

Electron impact phenomena

L. Muldawer · Journal of the Franklin Institute · 1958 · 438 citations

Reactive Plasma Deposited Si‐N Films for MOS‐LSI Passivation

A. K. Sinha, H. J. Levinstein, T. E. Smith et al. · Journal of The Electrochemical Society · 1978 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +17

Chemical vapour deposition promoted by r.f. discharge

H.F. Sterling, R. C. G. Swann · Solid-State Electronics · 1965 · 197 citations

Natural Sciences, Chemical Engineering, Chemistry +6

Lorentz-Lorenz correlation for reactively plasma deposited Si-N films

A. K. Sinha, E. Lugujjo · Applied Physics Letters · 1978 · 70 citations

Natural Sciences, Materials Science, Physics +17