Cluster size dependences of bombardment effects using mass-selected gas cluster ion beams

Sputtering Yields at Very Low Bombarding Ion Energies

R. V. Stuart, G. K. Wehner · Journal of Applied Physics · 1962 · 304 citations

Displacement Thresholds, Ion Implantation, Engineering +8

Surface treatment of diamond films with Ar and O2 cluster ion beams

Noriaki Toyoda, N. Hagiwara, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 81 citations

Materials Science, Ion Implantation, Engineering +6

Cluster size dependence of sputtering yield by cluster ion beam irradiation

Toshio Seki, Takatoshi Murase, Jiro Matsuo · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 63 citations

Ion Implantation, Engineering, Physics +6

Non-linear processes in the gas cluster ion beam modification of solid surfaces

Isao Yamada, Jiro Matsuo, Noriaki Toyoda et al. · Materials Science and Engineering A · 1998 · 63 citations

Materials Science, Cluster Science, Ion Implantation +9

Molecular dynamics study of damage formation characteristics by large cluster ion impacts

Takaaki Aoki, Jiro Matsuo, Gikan H. Takaoka · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 53 citations

Damage Formation Characteristics, Cluster Science, Chemical Kinetics +9