Concepedia

Abstract

We report on the fabrication of ZnO:N by thermal oxidation of sputter-deposited zinc nitride. Through optimising several technological steps we achieved p-type conductivity with carrier concentration in mid 1017 cm–3 range and mobility of ∼10 cm2/Vs. PL spectra of p-type ZnO:N films show a sharp peak at 3.36 eV, most likely due to neutral acceptor bound excitons. The transmittance of p-ZnO:N in the whole visible spectrum is ∼80 % making it suitable for transparent electronics. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)