Concepedia

The influence of surface topography and angle of adatom incidence on growth structure in sputtered chromium

J.W. Patten

Thin Solid Films · 1979 · 45 citations · 15 references

DOI

Concepts

References

15

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

, , +16

Columnar microstructure in vapor-deposited thin films

A.G. Dirks, H. J. Leamy · Thin Solid Films · 1977 · 756 citations

, , +5

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1975 · 432 citations

, , +19

Microstructure and magnetism in amorphous rare-earth–transition-metal thin films. I. Microstructure

H. J. Leamy, A.G. Dirks · Journal of Applied Physics · 1978 · 168 citations

, , +20

The influence of bias sputter parameters on thick copper coatings deposited using a hollow cathode

John A. Thornton · Thin Solid Films · 1977 · 83 citations

, , +10