Bulk acoustic wave resonator operating at 8GHz for gravimetric sensing of organic films

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 439 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Acoustic Wave Sensors

Jay W. Grate, G.C. Frye · Sensors Update · 1996 · 341 citations

Thin film bulk wave acoustic resonators (FBAR) for wireless applications

R. Ruby, P. Bradley, Yury Oshmyansky et al. · 2002 · 318 citations

Engineering, Electrical Engineering, Materials Science +13

Thickness dependence of the properties of highly<i>c</i>-axis textured AlN thin films

F. Martin, Paul Muralt, M.-A. Dubois et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 304 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17