Rapid thermal processing technology for the 21st century

Warpage of Silicon Wafers

B. Leroy, Christian Plougonven · Journal of The Electrochemical Society · 1980 · 96 citations

Natural Sciences, Materials Engineering, Materials Science +15

Single electron electronics: Challenge for nanofabrication

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 61 citations

Engineering, Electrical Engineering, Materials Science +17

The Effect of Multilayer Patterns on Temperature Uniformity during Rapid Thermal Processing

Jeffrey P. Hebb, Klavs F. Jensen · Journal of The Electrochemical Society · 1996 · 41 citations

Engineering, Materials Engineering, Materials Science +17

Boron Implanted Shallow Junction Formation By High-temperature/ Short-time/high-ramping-rate(400/spl deg/C/sec) RTA

Shishiguchi, Mineji, Hayashi et al. · Symposium on VLSI Technology · 1997 · 40 citations

Engineering, Materials Engineering, Materials Science +13

Rapid thermal and integrated processing

Materials & Design (1980-2015) · 1992 · 37 citations

Engineering, Manufacturing Engineering, Materials Science +12