Publication | Closed Access
Preparation and properties of amorphous silicon produced by a consecutive, separated reaction chamber method
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Citations
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References
1983
Year
Materials ScienceMaterials EngineeringEngineeringMicrofabricationApplied PhysicsSiliceneAmorphous SiliconSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorMicroelectronics
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