Publication | Closed Access
Stability of La2O3 and GeO2 passivated Ge surfaces during ALD of ZrO2 high-k dielectric
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Citations
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References
2011
Year
Materials EngineeringMaterials ScienceSurface CharacterizationGe SurfacesEngineeringZro2 High-k DielectricOxide ElectronicsSurface ScienceApplied PhysicsSurface AnalysisGallium OxideElectrical PropertyElectrical Insulation
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