The temperature dependence of the refractive index of silicon at elevated temperatures at several laser wavelengths

Abstract

The refractive index of silicon has been measured at elevated temperatures at several different laser wavelengths of the HeNe and the Ar+ cw lasers. This data, along with the reinterpretation of polarization modulation ellipsometry data, shows that the refractive index is linear with temperature (from 25 to ∼750 °C) and that the temperature coefficient of the refractive index increases as the wavelength of light decreases.