Oxygen transportation during Czochralski silicon crystal growth

The Distribution of Solute in Crystals Grown from the Melt. Part I. Theoretical

Justin Burton, R. C. Prim, W. P. Slichter · The Journal of Chemical Physics · 1953 · 1.4K citations

Natural Sciences, Materials Engineering, Materials Science +17

Infrared Absorption and Oxygen Content in Silicon and Germanium

W. Kaiser, P. H. Keck, C. F. M. de Lange · Physical Review · 1956 · 401 citations

Natural Sciences, Chemistry, Materials Science +17

Intrinsic gettering by oxide precipitate induced dislocations in Czochralski Si

T. Y. Tan, E.E. Gardner, W. K. Tice · Applied Physics Letters · 1977 · 390 citations

Engineering, Materials Engineering, Materials Science +17

Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon

Y. Yatsurugi, Nobu Akiyama, Yoshiyuki Endo et al. · Journal of The Electrochemical Society · 1973 · 272 citations

Natural Sciences, Chemistry, Materials Science +13

Oxygen Content of Silicon Single Crystals

W. Kaiser, P. H. Keck · Journal of Applied Physics · 1957 · 253 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15