Thin Solid Films · 1984 · 20 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsAmorphous SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsStrain SensorsThin Film Electrical PropertiesAmorphous Semiconductor FilmsAmorphous SiliconLow-power SensorsPiezoresistive Strain SensorsSemiconductor Strain GaugesSilicon Thin FilmsStrain Gauge SensorsThin-film Strain Gauges
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