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Summary Abstract: Semiconducting silicides as potential materials for electro-optic very large scale integrated circuit interconnects
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1986
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Electrical EngineeringOptical MaterialsEngineeringApplied PhysicsLarge ScalePotential MaterialsSemiconductor Device FabricationIntegrated CircuitsSummary AbstractSilicon On InsulatorMicroelectronicsInterconnect (Integrated Circuits)
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