Concepedia

Summary Abstract: Semiconducting silicides as potential materials for electro-optic very large scale integrated circuit interconnects

M. Bost, John E. Mahan

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 87 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsElectro-optic EffectsElectro-optic MaterialsSemiconducting MaterialsSemiconductor Device MaterialsSemiconductor PhysicsSemiconductor Thin FilmsSilicide Contacts

Abstract

First Page