Identification of getter defects in high-energy self-implanted silicon at Rp/2 - Concepedia

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Identification of getter defects in high-energy self-implanted silicon at Rp/2

21

Citations

3

References

2001

Year

R. Krause‐Rehberg, F. Börner, F. Redmann, J. Gebauer, R. Kögler, R. Kliemann, W. Skorupa, Werner Egger, G. Kögel, W. Triftshäuser

Physica B Condensed Matter

Defect ToleranceElectrical EngineeringGetter DefectsEngineeringPhysicsNanoelectronicsApplied PhysicsDefect FormationSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSilicon Debugging

References

	Year	Citations

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