Surface and Coatings Technology · 2002 · 10 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyThin FilmsMetal Oxide NanomaterialsNanomaterial CharacterizationNanostructured SurfacesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsElectrical PropertiesElectronic Properties Of Metal Oxide NanostructuresReactive SputteringThin Oxide FilmsThin Oxide LayersThin-film OxidesTitanium Oxides
4