Mechanical and elastic properties of amorphous hydrogenated silicon films studied by broadband surface acoustic wave spectroscopy - Concepedia

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Mechanical and elastic properties of amorphous hydrogenated silicon films studied by broadband surface acoustic wave spectroscopy

67

Citations

19

References

1995

Year

R. Kuschnereit, Hassan E.S. Fath, A.A. Kolomenskii, M. Szabadi, Peter Hess

Applied Physics A

Materials ScienceEngineeringMicrofabricationAcoustic MetamaterialSilicon On InsulatorMechanical EngineeringApplied PhysicsSurface ScienceSilicon FilmsElastic PropertiesThin FilmsAmorphous SolidMicroelectronicsThin Film Processing

References

	Year	Citations

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