ZnO-Based Solar Blind Ultraviolet-C Photodetectors Using SiZnO Absorption Layer

Abstract

The p-ZnO:LiNO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> /i-SiZnO/n-ZnO:In (p-i-n) ZnO-based solar blind ultraviolet-C photodetectors were deposited by vapor cooling condensation system. In view of the high performances of the deposited ZnO-based films, the solar blind performance was resulted due to very low photoresponse in the visible (VIS) wavelength range. The ultraviolet (270 nm)/VIS (420 nm) rejection ratio of 1.01 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> was obtained. The dominant noise was flicker noise. Furthermore, the photoresponsivity of 0.260 A/W, the noise equivalent power of 3.54 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-12</sup> W, and the specific detectivity of 2.67 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">11</sup> cmHz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> /W were obtained, when the photodetectors operated at a reverse bias voltage of -5 V.