Publication | Closed Access
A comparison of TMGa and TEGa for low-temperature metalorganic chemical vapor deposition growth of CCI4-doped inGaAs
45
Citations
26
References
1994
Year
Materials ScienceMaterials EngineeringChemical EngineeringCci4-doped IngaasEngineeringChemistryChemical DepositionMicroelectronicsChemical Vapor Deposition
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