Boron-doped nanocrystalline silicon germanium thin films for uncooled infrared bolometer applications

Experimental studies on 1/f noise

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Evolution of the microstructure in microcrystalline silicon prepared by very high frequency glow-discharge using hydrogen dilution

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Linear uncooled microbolometer array based on VOx thin films

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IR bolometers based on amorphous silicon germanium alloys

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IR uncooled bolometers based on amorphous Ge/sub x/Si/sub 1-x/O/sub y/ on silicon micromachined structures

E. Iborra, M. Clément, L.V. Herrero et al. · Journal of Microelectromechanical Systems · 2002 · 61 citations

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