Epitaxial growth of optical waveguiding LiTaO₃films by excimer laser ablation

Abstract

Waveguiding epitaxial LiTaO3 films have been prepared on sapphire substrates by the excimer laser ablation technique. The as-grown films were characterized by Raman scattering, XRD and SEM techniques, which revealed that epitaxial (001)-oriented and (012)-oriented LiTaO3 films with small surface roughness were achieved on sapphire (001) and (012) substrates, respectively. Optical waveguiding properties were demonstrated by m-line measurement of TM and TE multimodes.