Publication | Closed Access
Chemical mechanical planarization of germanium shallow trench isolation structures using silica-based dispersions
16
Citations
7
References
2012
Year
Materials EngineeringMaterials ScienceChemical EngineeringMolecular SieveEngineeringSurface ScienceApplied PhysicsSiliceneSilica-based DispersionsChemical Mechanical PlanarizationGermanene
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