Parasitic reaction and its effect on the growth rate of AlN by metalorganic chemical vapor deposition - Concepedia

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Parasitic reaction and its effect on the growth rate of AlN by metalorganic chemical vapor deposition

108

Citations

12

References

2006

Year

Degang Zhao, J.J. Zhu, Desheng Jiang, Hui Yang, Junwu Liang, Xiangyang Li, Haimei Gong

Journal of Crystal Growth

Materials ScienceAluminium NitrideChemical EngineeringEngineeringCorrosionGrowth RateParasitic ReactionSurface ScienceChemistryChemical DepositionChemical Vapor Deposition

References

	Year	Citations

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