Concepedia

Publication | Closed Access

A study of parasitic reactions between NH3 and TMGa or TMAI

DOI

156

Citations

16

References

1996

Year

C. H. Chen, H. Liu, D. A. Steigerwald, W. Imler, Chia-Chen Kuo, M. G. Craford, M. J. Ludowise, S. D. Lester, Jun Amano
Journal of Electronic Materials

References

YearCitations

Page 1