Publication | Closed Access
Cluster beam deposition: a tool for nanoscale science and technology
422
Citations
131
References
2006
Year
Cluster SourcesEngineeringNanoclusterMechanical EngineeringNanostructured MaterialsSupersonic ExpansionsNanostructure SynthesisNanometrologyNanolithography MethodMaterials ScienceCluster SciencePhysicsNanotechnologySupersonic CombustionNano ScaleNanomaterialsMicrofabricationApplied PhysicsCluster Beam DepositionNanofabricationNanostructures
Gas phase nanoparticle production, manipulation and deposition is of primary importance for the synthesis of nanostructured materials and for the development of industrial processes based on nanotechnology. In this review we present and discuss this approach, introducing cluster sources, nanoparticle formation and growth mechanisms and the use of aerodynamic focusing methods that are coupled with supersonic expansions to obtain high intensity cluster beams with a control on nanoparticle mass and spatial distribution. The implication of this technique for the synthesis of nanostructured materials is also presented and applications are highlighted.
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