Scanning ion microscopy with low energy lithium ions

Nanoimprint Lithography: Methods and Material Requirements

L. Jay Guo · Advanced Materials · 2007 · 1.8K citations · Full text

Engineering, Materials Engineering, Materials Science +17

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Surface composition analysis by low-energy ion scattering

H.H. Brongersma, M. Draxler, M DERIDDER · Surface Science Reports · 2007 · 501 citations

Natural Sciences, Chemistry, Materials Science +14

Helium ion microscope: A new tool for nanoscale microscopy and metrology

Bill Ward, John Notte, N. P. Economou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 418 citations

Natural Sciences, Materials Science, Physics +14

Scattering of Low-Energy Ions from Clean Surfaces: Comparison of Alkali- and Rare-Gas-Ion Scattering

E. Taglauer, W. Englert, W. Heiland et al. · Physical Review Letters · 1980 · 149 citations

Natural Sciences, Materials Science, Physics +16