Impact of the Cu-based substrates and catalyst deposition techniques on carbon nanotube growth at low temperature by PECVD

M. Dubosc, S. Casimirius, Marie‐Paule Besland, Christophe Cardinaud, A. Granier, Jean‐Luc Duvail, A. Gohier, T. Minéa, V. Arnal, J. Torrès

Microelectronic Engineering · 2007 · 23 citations · 18 references

Concepts

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