Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties

TLDR

The study reports the synthesis of large, monodispersed carbon nanotube arrays that self‑orient on patterned porous silicon and plain silicon substrates. The method uses chemical vapor deposition with substrate‑design‑controlled catalyst size, patterning for nanotube positioning, and self‑assembly to achieve orientation. The growth and self‑orientation mechanisms were clarified, demonstrating that the well‑ordered nanotubes serve as effective field‑emission arrays and can be scaled up within existing semiconductor manufacturing.

Abstract

The synthesis of massive arrays of monodispersed carbon nanotubes that are self-oriented on patterned porous silicon and plain silicon substrates is reported. The approach involves chemical vapor deposition, catalytic particle size control by substrate design, nanotube positioning by patterning, and nanotube self-assembly for orientation. The mechanisms of nanotube growth and self-orientation are elucidated. The well-ordered nanotubes can be used as electron field emission arrays. Scaling up of the synthesis process should be entirely compatible with the existing semiconductor processes, and should allow the development of nanotube devices integrated into silicon technology.