Publication | Closed Access
Electrical study of sulfur passivated In0.53Ga0.47As MOS capacitor and transistor with ALD Al2O3 as gate insulator
103
Citations
6
References
2009
Year
Electrical EngineeringEngineeringElectronic EngineeringApplied PhysicsGate InsulatorElectrical StudyMicroelectronicsSemiconductor DeviceAld Al2o3
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