Growth kinetics of N-face polarity GaN by plasma-assisted molecular-beam epitaxy

Abstract

We have studied the surface kinetics of N-face GaN during molecular-beam epitaxial growth by investigating the Ga wetting and the surface morphology. In the case of N-face GaN, it is not possible to establish the self-regulated Ga bilayer that is used as a surfactant for molecular-beam-epitaxy growth of Ga-face GaN. Indeed, to prevent the accumulation of Ga droplets, growth of the N-face GaN must be performed with less than one monolayer of excess Ga on the growing surface. Optimum surface morphology is achieved when growth is performed at the Ga accumulation limit.