Some properties of evaporated amorphous silicon made with atomic hydrogen

David L. Miller, H. D. Lutz, H. J. Wiesmann, Edmond Rock, Ajay Ghosh, S. Ramamoorthy, Myron Strongin

Journal of Applied Physics · 1978 · 20 citations · 7 references

Concepts

Abstract

We describe measurements on a-Si films made by adding atomic hydrogen during evaporation of silicon. The material has conductivity comparable to that formed by silane decomposition and is also photoconducting. The photocurrent in these initial experiments is smaller than in the bes silane-produced films.

References

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