High-Q photonic crystal microcavities fabricated in a thin GaAs membrane

Abstract

We report on the fabrication of photonic crystal microcavities in GaAs having H1 and H2 defects for lattice constants as small as 255 nm. In H2 microcavities, we observed resonances with Q factors as high as 4000. The degeneracy of these high-Q modes is lifted by the imperfect nature of the fabrication process.