Optical pattern formation in a-SiC:H films by Ga+ ion implantation

Development of a high-brightness gas field-ionization source

K. F. Böhringer, Karl Jousten, S. Kalbitzer · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 44 citations

Natural Sciences, Astronomy, Physics +10

Crystalline-amorphous contrast formation in thermally crystallized SiC

B. Ruttensperger, G. Krötz, G. Müller et al. · Journal of Non-Crystalline Solids · 1991 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +11

Beam processing of advanced materials

Jaswant Singh, S. M. Copley · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1993 · 42 citations

Engineering, Materials Engineering, Materials Science +8

The contribution of ion-beam techniques to the physics and technology of amorphous semiconductors

Gerhard Müller · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 26 citations

Natural Sciences, Materials Science, Physics +14

Writing implantation with a high current density focused ion beam

L. Bischoff, E. Hesse, D. Panknin et al. · Microelectronic Engineering · 1994 · 19 citations

Engineering, Electrical Engineering, Physics +9