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EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationElectrostatic ActuationMems DesignMems FabricationMems MaterialsMems SwitchesRf MemsActuation Voltage ReductionLow-power ActuationLow-voltage ActuationOhmic Mems SwitchesOhmic Rf Mems SwitchesRf Mems SwitchesSwitch Contact Resistance
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