Publication | Closed Access
Different methods for the determination of damage profiles in Si from RBS-channeling spectra: a comparison
57
Citations
14
References
1996
Year
Electrical EngineeringDamage MechanismEngineeringPhysicsNatural SciencesSpectroscopyApplied PhysicsInstrumentationSilicon On InsulatorMicroelectronicsRbs-channeling SpectraDamage ProfilesDifferent MethodsSilicon Debugging
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