Publication | Closed Access

Microstructure and electrical resistivity of TiN films deposited on heated and negatively biased silicon substrates

Materials EngineeringMaterials ScienceElectrical EngineeringTin FilmsEngineeringSpecific ResistanceBiased Silicon SubstratesNanoelectronicsSurface ScienceApplied PhysicsSemiconductor MaterialThin FilmsSilicon On InsulatorMicroelectronicsElectrical ResistivityThin Film Processing