Concepedia

Microstructure and electrical resistivity of TiN films deposited on heated and negatively biased silicon substrates

D. Mahéo, J.M. Poitevin

Thin Solid Films · 1994 · 23 citations · 39 references

DOI

Concepts

References

39

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

, , +12

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

, , +12

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

, , +10

The development of grain structure during growth of metallic films

C.R.M. Grovenor, H. T. G. Hentzell, D. A. Smith · Acta Metallurgica · 1984 · 399 citations

, , +14

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

, , +16