Multiscale material removal modeling of chemical mechanical polishing - Concepedia

Concepedia

Publication | Closed Access

Multiscale material removal modeling of chemical mechanical polishing

88

Citations

35

References

2003

Year

Jongwon Seok, Cyriaque P. Sukam, Andrew T. Kim, John Tichy, Timothy S. Cale

Materials ScienceEngineeringMaterial ProcessingMaterial MachiningMechanical EngineeringChemical Mechanical PolishingSurface PolishingAbrasive MachiningMicrostructureMultiscale Modeling

References

	Year	Citations

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