Concepedia

Stress and adhesion of chromium and boron films deposited under ion bombardment

Martin Barth, Wolfgang Ensinger, Volker Hoffmann, Gerhard Wolf

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 23 citations · 8 references

DOI

Concepts

References

8

Ion bombardment modification of surfaces

G. F. Doughty · Precision Engineering · 1985 · 218 citations

, , +12

Modification of niobium film stress by low-energy ion bombardment during deposition

J. J. Cuomo, J. M. E. Harper, C. R. Guarnieri et al. · Journal of Vacuum Science and Technology · 1982 · 160 citations

, , +16

Modification of evaporated chromium by concurrent ion bombardment

David W. Hoffman, M. R. Gaerttner · Journal of Vacuum Science and Technology · 1980 · 156 citations

, , +15

Thin film annealing by ion bombardment

E H Hirsch, Imre Varga · Thin Solid Films · 1980 · 105 citations

, , +12

Mechanical properties of optical films

H.K. Pulker · Thin Solid Films · 1982 · 74 citations

, , +14