Publication | Closed Access
Nanofluidic channels by anodic bonding of amorphous silicon to glass to study ion-accumulation and ion-depletion effect
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Citations
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References
2005
Year
Materials ScienceIon ImplantationEngineeringMicrofabricationNanotechnologyApplied PhysicsNanofluidicsAmorphous SiliconAnodic BondingAmorphous SolidSilicon On InsulatorMicroelectronicsNanofluidic ChannelsIon ProcessMicrofluidics
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