Concepedia

Arindom Datta

AD

10

Publications

393

Citations

10

H-Index

2001

Active since

Affiliations

Seoul National University(Current)

University of Wisconsin–Madison

Arindom Datta is an author at Seoul National University specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsMicrostructureSurface ScienceMicroelectronicsMicrofabricationMaterials EngineeringElectrical Engineering

Publications per year

2001–2007

10

Publications

10

Design, fabrication and characterization of metal embedded thin film thermocouples with various film thicknesses and junction sizes

Xugang Zhang, Hongseok Choi, Arindom Datta et al. · Journal of Micromechanics and Microengineering · 2006 · 88 citations

Engineering, Thin Film Process Technology, Junction Sizes +27

Are Diamonds a MEMS' Best Friend?

Orlando Auciello, Sergio Pacheco, Anirudha V. Sumant et al. · IEEE Microwave Magazine · 2007 · 88 citations

Engineering, Radio Frequency, Oscillators +21

Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization

Ki Tae Nam, Arindom Datta, Soo‐Hyun Kim et al. · Applied Physics Letters · 2001 · 45 citations

Materials Science, Materials Engineering, Engineering +15

Nanofluidic channels by anodic bonding of amorphous silicon to glass to study ion-accumulation and ion-depletion effect

Arindom Datta, Shubhra Gangopadhyay, H. Temkin et al. · Talanta · 2005 · 39 citations

Materials Science, Ion Implantation, Engineering +12

Study on Embedding and Integration of Microsensors Into Metal Structures for Manufacturing Applications

Xudong Cheng, Arindom Datta, Hongseok Choi et al. · Journal of Manufacturing Science and Engineering · 2006 · 38 citations

Engineering, Mechanical Engineering, Real Time Monitoring +16

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