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Residual stress measurements of thin aluminum metallizations by continuous indentation and x-ray stress measurement techniques

Materials ScienceEngineeringContinuous IndentationSevere Plastic DeformationMechanical EngineeringStressstrain AnalysisResidual Stress MeasurementsResidual StressPlasticityMetal FormingWork HardeningThin Aluminum MetallizationsMechanics Of MaterialsMicrostructure