Surface controlled plasma deposition and etching of silicon near the chemical equilibrium

Determination of surface roughness and optical constants of inhomogeneous amorphous silicon films

R. Swanepoel · Journal of Physics E Scientific Instruments · 1984 · 721 citations

Natural Sciences, Materials Engineering, Materials Science +17

Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasma

Akihisa Matsuda · Journal of Non-Crystalline Solids · 1983 · 646 citations

Natural Sciences, Materials Engineering, Materials Science +14

Raman scattering from small particle size polycrystalline silicon

Zafar Iqbal, S. Vepřek, A.P. Webb et al. · Solid State Communications · 1981 · 326 citations

Natural Sciences, Materials Science, Physics +12

A thermodynamic criterion of the crystalline-to-amorphous transition in silicon

S. Vepřek, Zafar Iqbal, F.-A. Sarott · Philosophical Magazine B · 1982 · 289 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effects of hydrogen atoms on the network structure of hydrogenated amorphous and microcrystalline silicon thin films

Atsushi Asano · Applied Physics Letters · 1990 · 138 citations

Natural Sciences, Materials Engineering, Materials Science +17