Publication | Closed Access
Surface controlled plasma deposition and etching of silicon near the chemical equilibrium
33
Citations
8
References
1993
Year
Materials SciencePlasma DepositionEngineeringMicrofabricationSurface ScienceChemical EquilibriumApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorPlasma ProcessingPlasma EtchingChemical Vapor Deposition
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