Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 221 citations · 0 references
Natural SciencesMaterials SciencePhysicsMaterials CharacterizationMaterials PhysicsThin FilmsAtomic Force MicroscopyFerroelectric MaterialsPiezoelectric CeramicsPiezoelectric MaterialsScanning Probe MicroscopyThin-film MaterialsFerroelectric Domain FormationFerroelectric PropertiesFerroelectric Thin FilmsPiezoelectric Domain ImagingPiezoelectric PropertiesPiezoelectric Thin FilmsPiezoelectricityThin Film Ferroelectrics
A piezoresponse technique based on scanning force microscopy (SFM) has been used for studying domain structure in ferroelectric thin films. Studies were performed on Pb(Zrx,Ti1−x)O3(PZT) thin films produced by a sol–gel method. The piezoresponse images of the PZT films were taken before and after inducing polarization in the films by applying a direct current voltage between the bottom electrode and the SFM tip. Polarization induced patterns were written with 20 V pulses and subsequently imaged by the SFM piezoresponse technique. The effect of the film structure on the imaging resolution of domains is discussed.