Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing

Ya Cheng, Koji Sugioka, Katsumi Midorikawa · Optics Letters · 2004 · 229 citations

Engineering, Materials Science, Microfabrication +16

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Koji Sugioka, Ya Cheng, Katsumi Midorikawa · Applied Physics A · 2005 · 194 citations

Engineering, Materials Engineering, Materials Science +16

Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser

Ya Cheng, Koji Sugioka, Katsumi Midorikawa et al. · Optics Letters · 2003 · 180 citations

Natural Sciences, Materials Engineering, Materials Science +14

A new masking technology for deep glass etching and its microfluidic application

Minqiang Bu, Tracy Melvin, G J Ensell et al. · Sensors and Actuators A Physical · 2004 · 168 citations

Engineering, Materials Engineering, Biomems +15

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica

Yves Bellouard, Ali A. Said, Philippe Bado · Optics Express · 2005 · 137 citations · Full text

Engineering, Materials Engineering, Mechanical Engineering +17