Micro-Heater on Membrane with Large Uniform-Temperature Area

Abstract

In this paper, the thermal performance of a heater on membrane was analyzed from a ring heater by a conventional simplified model. Some preliminary principles of the structure design are concluded for heaters working in vacuum or in atmosphere. According to the principles, an optimized heater structure is demonstrated, and the coupled thermal-electrical finite element method (ANSYS) is employed to simulate the structures. Experimental results indicated that the temperature distributions are quite in agreement with the simulations with large uniform-temperature area.