Research on the cast molding process for high quality PDMS molds

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography

Heinz Schmid, Bruno Michel · Macromolecules · 2000 · 667 citations

Natural Sciences, Materials Engineering, Materials Science +15

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 564 citations

Engineering, Materials Engineering, Materials Science +16

A Photocurable Poly(dimethylsiloxane) Chemistry Designed for Soft Lithographic Molding and Printing in the Nanometer Regime

Kyung Moon Choi, John A. Rogers · Journal of the American Chemical Society · 2003 · 308 citations

Natural Sciences, Materials Engineering, Materials Science +12

Polymer embossing tools for rapid prototyping of plastic microfluidic devices

Jagannathan Narasimhan, Ian Papautsky · Journal of Micromechanics and Microengineering · 2003 · 153 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17