Microelectronic Engineering · 1994 · 47 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsAtomic Force MicroscopyNanomaterial CharacterizationNanoscale MaterialsSurface HardnessThin Film Mechanical PropertiesThin-film MaterialsAtomic Force Microscopy AnalysisAtomic Force Microscopy Surface AnalysisMechanical Properties Of NanomaterialsThin Film MechanicsThin Film Surface CharacterizationThin Films Of Soft MaterialsTip-sample Adhesion
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G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text