Glow discharge simulation through solutions to the moments of the Boltzmann transport equation

Abstract

A self-consistent continuum model is presented for glow discharges based on the moments of the Boltzmann transport equation. The resultant set of governing equations consist of continuity and momentum equations for electrons and ions, an energy conservation equation for electrons and Poisson’s equation. An efficient numerical scheme to solve the set of coupled equations is presented. Results from case studies of dc discharges are used to illustrate the model. A parametric study varying the cathode voltage, gas pressure, and secondary electron emission coefficient predicts many of the well-known features of dc discharges.